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Ultra-High and Extreme Ultra-High Vacuum Gauges&endash; Patent Applied For X-ray
induced emission of electrons from the ion collector of a
Bayard-Alpert gauge is recognized as a cause of falsely high
readings at low pressures and is a characteristic of all
Bayard-Alpert gauges. The error in the UHV range can exceed
50% with a conventional Bayard-Alpert gauge. The patented
ETI gauge essentially eliminates the x-ray error by use of
high stability materials and a patented x-ray cancellation
technique. This is a high-performance gauge that requires a
special gauge controller, which provides an auxiliary signal
and an improved electrometer to take full advantage of the
extended range (1x 10-12
Torr).
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